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Tensile fracture of integrated single-crystal silicon nanowire using MEMS electrostatic testing device

By Toshiyuki Tsuchiya, Tetsuya Hemmi, Jun-ya Suzuki, Yoshikazu Hirai and Osamu Tabata
Publisher: Elsevier BV
Year: 2016
DOI identifier: 10.1016/j.prostr.2016.06.178
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Provided by: MUCC (Crossref)
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