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A novel Model for the Mechanism of Laser-Induced Back Side Wet Etching in Aqueous Cu Solutions using ns Pulses at 1064nm

By P. Schwaller, S. Zehnder, U. von Arx and B. Neuenschwander
Publisher: Elsevier BV
Year: 2011
DOI identifier: 10.1016/j.phpro.2011.03.121
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Provided by: MUCC (Crossref)
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