Article thumbnail

CMOS platform for atomic-scale device fabrication

By Tomáš Škereň, Nikola Pascher, Arnaud Garnier, Patrick Reynaud, Emmanuel Rolland, Aurélie Thuaire, Daniel Widmer, Xavier Jehl and Andreas Fuhrer
Publisher: IOP Publishing
Year: 2018
DOI identifier: 10.1088/1361-6528/aad7ab
OAI identifier:
Provided by: MUCC (Crossref)
Download PDF:
Sorry, we are unable to provide the full text but you may find it at the following location(s):
  • http://stacks.iop.org/0957-448... (external link)
  • http://iopscience.iop.org/arti... (external link)

  • To submit an update or takedown request for this paper, please submit an Update/Correction/Removal Request.

    Suggested articles