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CMOS platform for atomic-scale device fabrication

By Tomáš Škereň, Nikola Pascher, Arnaud Garnier, Patrick Reynaud, Emmanuel Rolland, Aurélie Thuaire, Daniel Widmer, Xavier Jehl and Andreas Fuhrer
Publisher: IOP Publishing
Year: 2018
DOI identifier: 10.1088/1361-6528/aad7ab
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Provided by: MUCC (Crossref)
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