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High-resolution investigations of ripple structures formed by femtosecond laser irradiation of silicon

By M. Schade, O. Varlamova, J. Reif, H. Blumtritt, W. Erfurth and H. S. Leipner
Publisher: Springer Science and Business Media LLC
Year: 2009
DOI identifier: 10.1007/s00216-009-3342-3
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Provided by: MUCC (Crossref)
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