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Wafer-level microstructuring of glassy carbon

By Loïc E. Hans, Karin Prater, Cédric Kilchoer, Toralf Scharf, Hans Peter Herzig and Andreas Hermerschmidt
Publisher: SPIE
Year: 2014
DOI identifier: 10.1117/12.2038396
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Provided by: MUCC (Crossref)
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