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Effects of incident N atom kinetic energy on TiN/TiN(001) film growth dynamics: A molecular dynamics investigation

By D. Edström, D. G. Sangiovanni, L. Hultman, I. Petrov, J. E. Greene and V. Chirita
Publisher: AIP Publishing
Year: 2017
DOI identifier: 10.1063/1.4972963
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Provided by: MUCC (Crossref)
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