Barrier/Cu contact resistivity

By J.S. Reid, M.A. Nicolet, M.S. Angyal, D. Lilienfeld, Y. Shacham-Diamand and P.M. Smith

Publisher: Office of Scientific and Technical Information (OSTI)

Year: 2007

DOI identifier: 10.2172/119996

OAI identifier:

Provided by: MUCC (Crossref)

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