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Barrier/Cu contact resistivity

By J.S. Reid, M.A. Nicolet, M.S. Angyal, D. Lilienfeld, Y. Shacham-Diamand and P.M. Smith
Publisher: Office of Scientific and Technical Information (OSTI)
Year: 2007
DOI identifier: 10.2172/119996
OAI identifier:
Provided by: MUCC (Crossref)
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