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A Novel Method to Fabricate Silicon Nanowire p–n Junctions by a Combination of Ion Implantation and in-situ Doping

By Pratyush Das Kanungo, Reinhard Kögler, Peter Werner, Ulrich Gösele and Wolfgang Skorupa
Publisher: Springer Nature
Year: 2009
DOI identifier: 10.1007/s11671-009-9472-x
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Provided by: MUCC (Crossref)
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