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Modeling and Manufacturing of a Micromachined Magnetic Sensor Using the CMOS Process without Any Post-Process

By Jian-Zhi Tseng, Chyan-Chyi Wu and Ching-Liang Dai
Publisher: MDPI AG
Year: 2014
DOI identifier: 10.3390/s140406722
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Provided by: MUCC (Crossref)
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