CP 1 Model Order Reduction for the extraction of small signal equivalent circuit models of RF-MEMS


Abstract—A reduced order model for the small signal analysis of micromechanical structures (MEMS) has been extracted by applying model order reduction (MOR) to their finite element models. The low-order model conserves the accuracy belonging to the finite element method, while drastically reducing the computational time. Moreover, it gives a description of the device’s terminal behaviour and can therefore be employed for circuit and system level simulations of MEMS devices. Keywords—MOR, electromechanical coupling, harmonic pre-stressed analysis I

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oaioai:CiteSeerX.psu:10.1...Last time updated on 10/22/2014

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