Dependence of boron incorporation in delta layers on CVD diamond growth process and misorientation angle

By M.A. Lobaev, A.M. Gorbachev, A.L. Vikharev, D.B. Radishev, V.A. Isaev, S.A. Bogdanov, P.A. Yunin, M.N. Drozdov and J.E. Butler

Publisher: 'EDP Sciences'

Year: 2017

DOI identifier: 10.1051/epjconf/201714902014

OAI identifier:

Provided by: MUCC (Crossref)

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