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Dependence of boron incorporation in delta layers on CVD diamond growth process and misorientation angle

By M.A. Lobaev, A.M. Gorbachev, A.L. Vikharev, D.B. Radishev, V.A. Isaev, S.A. Bogdanov, P.A. Yunin, M.N. Drozdov and J.E. Butler
Publisher: 'EDP Sciences'
Year: 2017
DOI identifier: 10.1051/epjconf/201714902014
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Provided by: MUCC (Crossref)
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