Performance characterisation of a new photo-microsensor based sensing head for displacement measurement
Displacement sensor, IR slotted photomicro-sensors (SPMs), Mechanical shutter, Micrometer range, Nanometer-scale resolution, Self-correction arrangement, /dk/atira/pure/subjectarea/asjc/2200/2208, Electrical and Electronic Engineering, /dk/atira/pure/subjectarea/asjc/3100/3104, Condensed Matter Physics, /dk/atira/pure/subjectarea/asjc/2500/2504, Electronic, Optical and Magnetic Materials, /dk/atira/pure/subjectarea/asjc/2500/2506, Metals and Alloys, /dk/atira/pure/subjectarea/asjc/2500/2508, Surfaces, Coatings and Films, /dk/atira/pure/subjectarea/asjc/3100/3105, Instrumentation, Research Disciplines (UoAs)/12, 12. Aeronautical, Mechanical, Chemical and Manufacturing Engineering, OA Required/no, No
Publisher: 'Elsevier BV'
DOI identifier: 10.1016/j.sna.2015.12.007
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