Solid micromechanical valves fabricated with in situ UV-LIGA assembled nickel

Abstract

In situ UV-LlGA assembled robust microcheck valves with large flow rates ( \u3e 10 ml/s, displacement related), high-pressure support ability ( \u3e 10 MPa) and high operational frequencies ( \u3e 10 kHz) made of nano-structured nickel were presented in this paper. The microvalve consists of an array of 80 single microvalves to achieve the required flow rates. A novel in situ UV-LIGA process was developed for the fabrication. Test results show that the forward flow rate is about 19 ml/s under pressure of 90 psi. The backward flow rate is negligible. The loading/unloading test results show that the flow rates were repeated very well over a large range of tested pressure differences. The reliability of the valve is ensured by the low stress valve design and the robust nano-structured nickel material fabricated. (C) 2005 Elsevier B.V. All rights reserved

Similar works

Full text

University of Central Florida (UCF): STARS (Showcase of Text, Archives, Research & Scholarship)Provided a free PDF (195.62 KB)

facultybib2000-7343oai:stars.library.ucf.edu:facultybib2000-7343
Last time updated on October 30, 2019

Having an issue?

Is data on this page outdated, violates copyrights or anything else? Report the problem now and we will take corresponding actions after reviewing your request.