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Portugal (2008)" DOI: 10.1063/1.2996830 Dust Growth by RF Sputtering

By B. Churton, L. Couëdel, A. A. Samarian, M. Mikikian and L. Boufendi

Abstract

Abstract. The effect of the dust particle growth by RF sputtering on glow discharge has been investigated. It has been found that the growth of dust particles modifies the electrical characteristics of the discharge. In particularly, the absolute value of the self-bias voltage decreases during the particle growth due to the electron losses on the dust particles. To find the correlation between the dust growth and the self bias evolution, dust particles have been collected at different times. The dust particle growth rate is found to be linear

Topics: Dust particles, growth, complex plasma PACS, 52.27.Lw
Year: 2008
OAI identifier: oai:CiteSeerX.psu:10.1.1.371.58
Provided by: CiteSeerX
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