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JOURNAL OF PHYSICS D: APPLIED PHYSICS

By Electronegative Plasma Equilibria, E Kawamura, A J Lichtenberg and M A Lieberman

Abstract

Electronegative plasma equilibria with spatially varying ionizatio

Year: 2012
OAI identifier: oai:CiteSeerX.psu:10.1.1.352.9783
Provided by: CiteSeerX
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