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By Eric Logean ∗a, Lubos Hvozdara A, Joab Di-francesco A, Hans Peter Herzig A, Reinhard Voelkel B, Martin Eisner B, Pierre-yves Baroni C, Michel Rochat C and Antoine Müller C

Abstract

High numerical aperture silicon collimating lens for mid-infrared quantum cascade lasers manufactured using wafer-level techniques

Topics: Optical collimation, mid-infrared micro-optics, quantum cascade laser, reactive ion etching, mass
Year: 2013
OAI identifier: oai:CiteSeerX.psu:10.1.1.352.3642
Provided by: CiteSeerX
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