Abstract — In this paper, we present a design method for a ΣΔ-based closed loop gyroscope. The design is based on the equivalence between electro-mechanical ΣΔ noise transfer function and the noise transfer function of conventional electrical ΣΔ. The method is applied to a fourth-order electro-mechanical ΣΔ containing the gyroscope and a second order electrical filter. The noise and signal transfer functions as well as the stability of the designed electro-mechanical ΣΔ are analyzed. Simulation results of the closed loop ΣΔ-based gyroscope measuring the signalto-noise ratio are given and compared with the corresponding electrical modulator
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