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Cluster Imaging with a Direct Detection CMOS Pixel Sensor in Transmission Electron Microscopy

By Marco Battaglia A, Devis Contarato B, Peter Denes B and Piero Giubilato B C

Abstract

A cluster imaging technique for Transmission Electron Microscopy with a direct detection CMOS pixel sensor is presented. Charge centre-of-gravity reconstruction for individual electron clusters improves the spatial resolution and thus the point spread function. Data collected with a CMOS sensor with 9.5×9.5 µm 2 pixels show an improvement of a factor of two in point spread function to 2.7 µm at 300 keV and of a factor of three in the image contrast, compared to traditional bright field illumination

Topics: Key words, Monolithic active pixel sensor
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