Energy loss of electrons backscattered from solids: measured and calculated spectra for Al and Si

Abstract

Electron energy loss distributions relative to Al and Si are calculated for primary electron energies ranging from 500 eV to 2000 eV under the assumption that experimental spectra arise from electrons undergoing a single large-angle elastic scattering event (so-called V-type trajectories). The method used to calculate the spectra is based on the combination of the Chen and Kwei dielectric formalism with the V-type trajectory modeling. Good agreement is found between calculated and measured spectra