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Scanning Probe Position Encoder (SPPE)–a new approach for a high precision and high speed position measurement system

By Tetsuo Ohara and Ph. D

Abstract

SPIE 26th Annual International Symposium o

Topics: scanning probe microscopy, position encoder, nanotechnology, overlay metrology, position measurement
Year: 2011
OAI identifier: oai:CiteSeerX.psu:10.1.1.197.8463
Provided by: CiteSeerX
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