Skip to main content
Article thumbnail
Location of Repository

Generation of a Metamodel for a Micromachined Accelerometer using T-SPICE ™ and the IZ-Optimality Option of I-OPT™

By Hee Jung Lee, Selden B. Crary, Bachar Affour, David Bernstein, Yogesh B. Gianch, David M. Woodcock and Mary Ann Maher


We demonstrate a new method for dynamical parametric simulation of MEMS using IZ-optimal designs for FEA simulations, fitting using the best linear unbiased predictor, and extraction of relevant coefficients for solution of the appropriate ODE using T-SPICE. A five-factor microaccelerometer example demonstrates that highly accurate dynamical simulations are possible, in some cases, using a very small number of static FEA simulations

Topics: Design of experiments, computer simulation, I-optimality, microaccelerometer
Year: 2011
OAI identifier: oai:CiteSeerX.psu:
Provided by: CiteSeerX
Download PDF:
Sorry, we are unable to provide the full text but you may find it at the following location(s):
  • (external link)
  • (external link)
  • Suggested articles

    To submit an update or takedown request for this paper, please submit an Update/Correction/Removal Request.