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Generation of a Metamodel for a Micromachined Accelerometer using T-SPICE ™ and the IZ-Optimality Option of I-OPT™

By Hee Jung Lee, Selden B. Crary, Bachar Affour, David Bernstein, Yogesh B. Gianch, David M. Woodcock and Mary Ann Maher

Abstract

We demonstrate a new method for dynamical parametric simulation of MEMS using IZ-optimal designs for FEA simulations, fitting using the best linear unbiased predictor, and extraction of relevant coefficients for solution of the appropriate ODE using T-SPICE. A five-factor microaccelerometer example demonstrates that highly accurate dynamical simulations are possible, in some cases, using a very small number of static FEA simulations

Topics: Design of experiments, computer simulation, I-optimality, microaccelerometer
Year: 2011
OAI identifier: oai:CiteSeerX.psu:10.1.1.196.9182
Provided by: CiteSeerX
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