Abstract—A two dimensional numerical simulation has been performed for incompressible and compressible fluid flow through microchannels in slip flow regime. The Navier-Stokes equations have been solved in conjunction with Maxwell slip conditions for modeling flow field associated with slip flow regime. The wall roughness is simulated with triangular microelements distributed on wall surfaces to study the effects of roughness on fluid flow. Various Mach and Knudsen numbers are used to investigate the effects of rarefaction as well as compressibility. It is found that rarefaction has more significant effect on flow field in microchannels with higher relative roughness. It is also found that compressibility has more significant effects on Poiseuille number when relative roughness increases. In addition, similar to incompressible models the increase in average fRe is more significant at low Knudsen number flows but the increase of Poiseuille number duo to relative roughness is sharper for compressible models. The numerical results have also validated with some available theoretical and experimental relations and good agreements have been seen. Keywords—Relative roughness, slip flow, Poiseuille number. I
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