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Electrostatic Operation and Curvature Modeling for a MEMS Flexible Film Actuator

By Jr. B. Edmonds, J. Ernstberger, K. Ghosh, J. Malaugh, D. Nfodjo, W. Samyono, X. Xu, D. Dausch, S. Goodwin and R. C. Smith
Year: 2004
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