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New Experimental Device for Investigation of RF Discharge Plasma in Ar + I2 Mixture

By I. Pickova, P. Kudrna and M. Tichy

Abstract

Abstract. In this article we describe new experimental device which is currently in construction. In this device, the hollow cathode radiofrequency (RF) low pressure discharge in the mixture of Ar with I2 vapors will be investigated by Langmuir probe. This work is loosely connected to the research of the oxygen-iodine laser at the Institute of Physics AS in Prague, where the RF discharge in mixtures containing iodine donors (molecules CH3I and CF3I) is currently investigated [Schmiedberger et al., 2008]. In this article the new experimental device and its current state of construction are described together with the necessary theory and future plans of the experiments. Theory Discharges can be divided into two groups: electropositive and electronegative discharges. Most of the discharges are electropositive, which means, that they consist of neutral particles, positive ions and electrons. Positive ions are mostly created in collisions of neutral particles with electrons in the process called electron impact ionization: A + e – → A + + 2e –. Further ionization mechanisms are e.g. stepwise ionization, Penning ionization, thermal ionization, photoionization, etc. In electronegative discharges we have neutrals, positive ions, negative ions and electrons

Year: 2011
OAI identifier: oai:CiteSeerX.psu:10.1.1.186.7743
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