This new LCR Meter is especially designed for measure ments of low-value components in integrated circuits and thin-film hybrid circuits, as well as of discrete components. It uses a four-pair measurement technique to reduce errors caused by stray capacitance, residual inductance, and mutual inductance of the test leads. by Kohichi Maeda IN THE MANUFACTURE of integrated circuits, good process control is essential if yield and re liability are to be maximized. Good process control requires many measurements of parameters on the chip; for example, capacitance versus voltage deter mines several electrical characteristics of junctions and is an important source of information about the process
To submit an update or takedown request for this paper, please submit an Update/Correction/Removal Request.