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© Copr. 1949-1998 Hewlett-Packard Co.An Automatic, Precision 1-MHz Digital LCR Meter

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Abstract

This new LCR Meter is especially designed for measure ments of low-value components in integrated circuits and thin-film hybrid circuits, as well as of discrete components. It uses a four-pair measurement technique to reduce errors caused by stray capacitance, residual inductance, and mutual inductance of the test leads. by Kohichi Maeda IN THE MANUFACTURE of integrated circuits, good process control is essential if yield and re liability are to be maximized. Good process control requires many measurements of parameters on the chip; for example, capacitance versus voltage deter mines several electrical characteristics of junctions and is an important source of information about the process

Year: 2011
OAI identifier: oai:CiteSeerX.psu:10.1.1.186.4509
Provided by: CiteSeerX
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