CAD for Opto-electronic Microsystems

Abstract

The use of MEMs technology has enabled the fabrication of micro-optical and micro-electro-mechanical systems on a common substrate. This has led to new challenges in computer aided design of optical micro-electro-mechanical systems. We have extended our free-space opto-electronic system CAD tool, Chatoyant, to meet the needs of optical MEMS designers. This paper presents new analysis techniques which extend our tool to support optical MEM system design. We demonstrate these extensions with the analysis of a 1x2 micro-optical MEM interferometer switch. Keywords: MEMS-CAD, optical MEMS, MOEMS, microoptic

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