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1 Nanomanufacturing of Atom-Based Dimensional Standards A Final Project Report of the National Advanced Manufacturing Testbed

By T. V. Vorburger, R. H. Allen, B. Damazo, J. Fu, D. Monk, M. Osti, J. Pellegrino, R. Rhorer, R. Russell, R. Silver, R. Sriram, K. Stouffer, D. A. Swyt, E. C. Teague, T. Wheatley and D. WilmeringT. V. Vorburger, R. H. Allen, B. Damazo, J. Fu, D. Monk, M. Osti, J. Pellegrino, R. Rhorer, R. Russell, R. Silver, R. Sriram, K. Stouffer, D. A. Swyt, E. C. Teague, T. Wheatley and D. Wilmering

Abstract

This report describes the accomplishments of the Nanomanufacturing of Atom-based Dimensional Standards Project, which operated as part of the National Advanced Manufacturing Testbed (NAMT), a program to research a wide range of leading edge technologies for manufacturing. As part of the NAMT vision, the Nanomanufacturing of Atom-based Dimensional Standards Project researched the techniques to manufacture and use dimensional standards at subnanometer levels of uncertainty. Its main area of application is the microelectronics and data storage industries where in the future, the critical dimensions of manufactured devices will grow continually smaller and where we anticipate that environments in which certain components are manufactured and used will become more specialized and exotic. This report discusses developments in atom-based step height standards, atom-based linewidth standards, a vacuum-based artifact transport system, a portable data logger, design and communication processes, and telerobotics. Keywords: artifact transport; atom-based; collaborative design; data logger; dimensional standards; linewidth; nanomanufacturing; step height; telerobotics

Year: 2002
OAI identifier: oai:CiteSeerX.psu:10.1.1.161.3557
Provided by: CiteSeerX
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