Article thumbnail
Location of Repository

Identification of individual slit valves in semiconductor manufacturing fab based on their vibration signatures

By active 21st century Haoran Xie

Abstract

textSlit valves play an important role in semiconductor manufacturing industry. They enable creation of a vacuum environment required for wafer processing. Due to the high volume of production in the modern semiconductor industry, slit valves experience severe degradation over their useful lifetime. If maintenance is not applied in due time, degraded valves may lead to defects in end products because of pressure loss and particle generation. In this thesis, we proposed methods for signal processing and feature extraction for analysis of slit valve vibration signatures. These methods would be used to demonstrate the ability of reliably, accurately and efficiently distinguish between each individual valve via a multi-class classification procedure. Such ability is a clear illustration of the feasibility of vibration based monitoring of the slit valve conditions.Mechanical Engineerin

Topics: Slit valves, Semiconductor manufacturing, Vibrations based monitoring
Year: 2015
OAI identifier: oai:repositories.lib.utexas.edu:2152/28279
Provided by: UT Digital Repository

Suggested articles


To submit an update or takedown request for this paper, please submit an Update/Correction/Removal Request.