New insights on the chemistry of plasma-enhanced atomic layer deposition of indium oxysulfide thin films and their use as buffer layers in Cu(In,Ga)Se 2 thin film solar cell

Bugot, Cathy; Bouttemy, Muriel; Schneider, Nathanaelle; Etcheberry, Arnaud; Lincot, Daniel; Donsanti, Frédérique

10.1116/1.5048124

New insights on the chemistry of plasma-enhanced atomic layer deposition of indium oxysulfide thin films and their use as buffer layers in Cu(In,Ga)Se 2 thin film solar cell

Authors: Cathy Bugot
Muriel Bouttemy
Nathanaelle Schneider
Arnaud Etcheberry
Daniel Lincot
Frédérique Donsanti
Publication date: November 1, 2018
Publisher: 'American Vacuum Society'

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oai:HAL:hal-02148695v1Last time updated on 7/8/2019

This paper was published in HAL-Polytechnique.

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