Modeling of hydrocarbon species in ECR methane plasmas


ECR methane laboratory plasmas are modeled using both a simple zero-dimensional particle balance model and a fully kinetic model. The kinetic model consists of a two-dimensional in space, three-dimensional in velocity space particle-in-cell model with Monte-Carlo collisions in which electrons, ions and neutrals are treated as particles, moving in self-consistent electric and external magnetic fields. The model results are discussed and compared with experimental data

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Last time updated on June 15, 2019

This paper was published in MPG.PuRe.

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