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FREQUENCY-DEPENDENT INTERNAL INDUCTANCE ASSOCIATED WITH SILICON SUBSTRATE OF ON-CHIP INTERCONNECTS

By H. Ymeri, B. Nauwelaers, K. Maex, D. De Roest and M. Stucchi

Abstract

In previous work, a closed form expressions for the series line impedance per unit length of a single and multiple coupled interconnects on lossy silicon substrate were presented. In this paper, the induced current density distribution inside silicon substrate and quasi-static Green's function approach were used to derive the frequency-dependent closedform expression for the internal inductance per unit length accociated with the silicon substrate. With this expression, we can quantitatively determine what percentage of the total inductance per unit length is associated with the internal silicon substrate inductance for a given frequency. 1

Year: 2009
OAI identifier: oai:CiteSeerX.psu:10.1.1.135.3760
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