Abstract—This paper presents the importance of understanding defect propagation/growth and its impact on in-line yield prediction. In order to improve the prediction accuracy, impact of defect propagation and growth phenomena needs to be modeled and incorporated into yield prediction system. We developed a new yield prediction model by taking into account defect carryover. The empirical results of interlayer and intralayer defect propagation analysis using actual fabline data are presented. Index Terms—Critical area, defect propagation, defect growth, in-line inspection, yield model, yield prediction. I
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