Skip to main content
Article thumbnail
Location of Repository

Effects of Defect Propagation/Growth on In-Line Defect-Based Yield Prediction

By Wataru Shindo, Student Member, Raman K. Nurani and Andrzej J. Strojwas

Abstract

Abstract—This paper presents the importance of understanding defect propagation/growth and its impact on in-line yield prediction. In order to improve the prediction accuracy, impact of defect propagation and growth phenomena needs to be modeled and incorporated into yield prediction system. We developed a new yield prediction model by taking into account defect carryover. The empirical results of interlayer and intralayer defect propagation analysis using actual fabline data are presented. Index Terms—Critical area, defect propagation, defect growth, in-line inspection, yield model, yield prediction. I

Year: 2009
OAI identifier: oai:CiteSeerX.psu:10.1.1.135.2209
Provided by: CiteSeerX
Download PDF:
Sorry, we are unable to provide the full text but you may find it at the following location(s):
  • http://citeseerx.ist.psu.edu/v... (external link)
  • http://www-inst.eecs.berkeley.... (external link)
  • Suggested articles


    To submit an update or takedown request for this paper, please submit an Update/Correction/Removal Request.