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Photoinitiation systems and thermal decomposition of photodefinable sacrificial materials

By Xiaoqun Wu, Hollie A. Reed, Larry F. Rhodes, R. Ravikiran, Robert A. Shick, Clifford L. Henderson, Sue Ann Bidstrup Allen and Paul A. Kohl


ABSTRACT: The exposure characteristics of norbornenebased photosensitive sacrificial materials as functions of the photoinitiator have been investigated. The results show that the initiator, bis(2,4,6-trimethylbenzoyl)-phenylphosphine oxide, provides high photosensitivity and an adjustable contrast factor. The kinetics of the thermal decomposition of the polymers have been investigated with dynamic and isothermal thermogravimetric analysis to determine the most appropriate conditions for the thermal decomposition of th

Year: 2003
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