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Diamond-Like Carbon Film Deposition Using DC Ion Source with Cold Hollow Cathode

By E. F. Shevchenko, V. A. Tarala, M. Yu. Shevchenko and A. A. Titarenko
Publisher: 'Hindawi Limited'
Year: 2014
DOI identifier: 10.1155/2014/979450
OAI identifier:
Provided by: MUCC (Crossref)

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