Batch process for the fabrication of LiNbO3 photonic crystals using proton exchange followed by CHF3 reactive ion etching - CORE

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Batch process for the fabrication of LiNbO3 photonic crystals using proton exchange followed by CHF3 reactive ion etching

By G. Ulliac, N. Courjal, H.M.H. Chong and R.M. De La Rue

Publisher: 'Elsevier BV'

Year: 2008

DOI identifier: 10.1016/j.optmat.2008.03.004

OAI identifier:

Provided by: MUCC (Crossref)

Downloaded from https://eprints.soton.ac.uk/265983/1/BATCH_PROCESS_FOR_THE_FABRICATION_OF_LINBO3_PHC_USING_PROTON_EXCHANGE.pdf

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