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Batch process for the fabrication of LiNbO3 photonic crystals using proton exchange followed by CHF3 reactive ion etching

By G. Ulliac, N. Courjal, H.M.H. Chong and R.M. De La Rue
Publisher: 'Elsevier BV'
Year: 2008
DOI identifier: 10.1016/j.optmat.2008.03.004
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Provided by: MUCC (Crossref)

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