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Spray Coating of Photoresist for 3D Microstructures with Different Geometries

By Liming Yu, Yong Yeow Lee, Francis E H Tay and Ciprian Iliescu
Publisher: 'IOP Publishing'
Year: 2006
DOI identifier: 10.1088/1742-6596/34/1/155
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Provided by: MUCC (Crossref)
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