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Fabrication of a millinewton force sensor using low temperature co-fired ceramic (LTCC) technology

By Hansu Birol, Thomas Maeder, Ingo Nadzeyka, Marc Boers and Peter Ryser
Publisher: 'Elsevier BV'
Year: 2006
DOI identifier: 10.1016/j.sna.2006.05.025
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Provided by: MUCC (Crossref)
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