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Nanometrology using localized surface plasmon resonance spectroscopy

By Claus Jeppesen, Daniel N. Lindstedt, Asger V. Laurberg, Anders Kristensen and N. Asger Mortensen
Topics: etching, metallisation, optical testing, spectroscopy, surface plasmon resonance, Aerospace, Bioengineering, Communication, Networking and Broadcast Technologies, Components, Circuits, Devices and Systems, Engineered Materials, Dielectrics and Plasmas, Engineering Profession, Fields, Waves and Electromagnetics, General Topics for Engineers, Nuclear Engineering, Photonics and Electrooptics, Power, Energy and Industry Applications, collective coherent electron oscillations, Correlation, dense device layers, Educational institutions, fabrication process, gammadion test structures, imprinting, light excited surface plasmons, localized surface plasmon resonance spectroscopy, LSPR spectroscopy, metal-dielectric interface, nanometrology, Nanotechnology, optical characterization technique, Plasmons, scatterometry, Size measurement, Spectroscopy, transmission spectrum, Uncertainty
Publisher: IEEE
Year: 2013
DOI identifier: 10.1109/CLEOE-IQEC.2013.6801236
OAI identifier: oai:pure.atira.dk:publications/3837d7eb-be58-4aa7-bef0-fa4d71233ecc
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