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A novel radio-frequency plasma probe for monitoring systems in dielectric deposition processes

By Christian Schulz, Tim Styrnoll, Martin Lapke, Jens Oberrath, Robert Storch, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Musch, Thomas Mussenbrock and Ilona Rolfes
Topics: ddc:000, ddc:620, ddc:620, ddc:000, ddc:620, ddc:000, ddc:620, ddc:620, ddc:620, ddc:500, ddc:620, ddc:500, ddc:620, ddc:620, ddc:500, ddc:620, ddc:620
Year: 2012
DOI identifier: 10.1109/ICEAA.2012.6328725
OAI identifier: oai:bibliographie.ub.rub.de:a8bbacfb-0967-4a99-81f5-892e7e85d3f8
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