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Influence of Substrate Bias Voltage on the Properties of Sputtered Aluminum-Scandium Thin Sheets

By Julien Kovac, Heinz-Rolf Stock and Hans-Werner Zoch
Publisher: Scientific Research Publishing, Inc,
Year: 2012
DOI identifier: 10.4236/jsemat.2012.22018
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Provided by: MUCC (Crossref)
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