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Electrostatically actuated double cantileverl AFM probe for high speed imaging

By R. Vermeer, E. Sarajlic, M.H. Siekman, H. Kawakatsu, H. Fujita, N.R. Tas and H.V. Jansen


We present the design, fabrication and characterization of an electrostatically actuated AFM probe. The probe consists of two cantilevers, a relatively long, stiff cantilever on which end a smaller and softer cantilever with a sharp tip is incorporated. The deflection of the small cantilever is controlled by an electrostatic gap-closing actuator, which is monolithically integrated on the cantilevers. A combination of a small and fast cantilever with an integrated electrostatic actuator allows for a high frequency operation and high speed AFM imaging. We have designed and fabricated a probe with the large cantilever having a stiffness of over 400 N/m and small cantilevers with a stiffness of up to 3.2 N/m and a resonance frequency up to 643 kHz. We have confirmed a proper operation of the probe using high-speed imaging (8 scan lines per second) in electrostatically driven tapping mode

Publisher: IEEE
Year: 2013
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