oaioai:ir.semi.ac.cn:172111/18713

用于光电子器件的低成本、高反射率 SOR衬底（英文）

Authors
Publication date
1 January 2001
Publisher

Abstract

报道了一种包含一薄层单晶硅和隐埋Si/SiO_2布拉格反射器的SOR衬底。这种可用于光电子器件的衬底是由硅基乳胶粘接和智能剥离技术研制而成的。在垂直光照条件下，这种SOR衬底在1.3μm处的反射率接近100%

Similar works

Full text

thumbnail-image

Knowledge Repository of SEMI,CAS

redirect
oaioai:ir.semi.ac.cn:172111/18713
Last time updated on 15/03/2019

This paper was published in Knowledge Repository of SEMI,CAS.

Having an issue?

Is data on this page outdated, violates copyrights or anything else? Report the problem now and we will take corresponding actions after reviewing your request.