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A Survey of Modeling and Control Techniques for Micro- and Nanoelectromechanical Systems

By Antoine Ferreira and Sumeet Sunil Aphale


Peer reviewedPostprin

Topics: control, lab-on-a-chip, microelectromechanical systems (MEMS), modeling, nanoelectromechanical systems (NEMS), TA Engineering (General). Civil engineering (General), TA
Year: 2011
DOI identifier: 10.1109/TSMCC.2010.2072779
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