10.1117/12.2319938

Multiwavelength digital holography: Height measurements on linearly moving and rotating objects

Abstract

Multiwavelength digital holography enables precise and fast 3D height measurements of rough surfaces. To inspect objects during motion would enlarge the range of applications enormously. In this work the limits of this technique with respect to velocity and inclination angles are studied for linearly moving as well as for rotating objects. We demonstrate measurements on surfaces with inclination angles of up to 40° , moving linearly with a velocity of 2 mm/s, providing 2 μm accuracy, and on a rotating cylinder with circumferential speed of 10 mm/s, we achieve 1.1 μm precision. All measurements are conducted with less than 1 mW of continuous-wave laser light, so the object moves several micrometers during exposure time

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Fraunhofer-ePrints

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oai:fraunhofer.de:N-510063Last time updated on 1/7/2019

This paper was published in Fraunhofer-ePrints.

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