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Die Level 3D Heterogeneous Integration of a Microfluidic System

By N P Vamsi Krishna and Prosenjit Sen


Lab-on-a-chip (LOC) devices has enabled handheld sensing systems for chemical analysis and biological detection. Stacking based integration of various components of an LOC device would lead to system miniaturization and would allow accommodation of more functionalities in a given volume. In this paper, we report a 3D integrated heterogenous system incorporating a silicon photodetector, optical plastic filters, glass microfluidic device and an LED all stacked in 3D and interconnected to function as a fluorescence detection platform. Processing methodology and testing results are reported here

Topics: Centre for Nano Science and Engineering
Publisher: IEEE, 345 E 47TH ST, NEW YORK, NY 10017 USA
Year: 2017
DOI identifier: 10.1109/EPTC.2017.8277519
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