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Investigation of diffusional intermixing in Si/Co/Ta system by Secondary Neutral Mass Spectrometry

By Ákos Lakatos, Gábor Erdélyi, Alajos Makovec, Gábor Antal Langer, Attila Csik, Kálmán Vad and Dezső László Beke
Topics: Műszaki tudományok, Anyagtudományok és technológiák
Publisher: 'Elsevier BV'
Year: 2020
DOI identifier: 10.1016/j.vacuum.2011.07.017
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