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The initial stages of ZnO atomic layer deposition on atomically flat In 0.53 Ga 0.47 As substrates

By Evgeniy Skopin, Laetitia Rapenne, Hervé Roussel, Jean-Luc Deschanvres, Elisabeth BLANQUET, Gianluca Ciatto, Dillon Fong, Marie-Ingrid Richard and Hubert Renevier

Abstract

International audienc

Topics: [CHIM.MATE]Chemical Sciences/Material chemistry
Publisher: 'Royal Society of Chemistry (RSC)'
Year: 2018
DOI identifier: 10.1039/c8nr02440e
OAI identifier: oai:HAL:hal-01819188v1
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