10.1016/j.microrel.2008.03.024

The need for multi-scale approaches in Cu/low-k reliability issues

Abstract

Since recent years, micro-electronic industry changed the basic materials from Al/SiO2 to Cu/low-k in ICinterconnect structure. As a consequence, new reliability issues at device/product level has been discovered, and most of the failure modes have the characteristics of multi-scale: the failure of the m or nm induces the malfunction of the device/product. Under the pressure of the time-to-market, the industries, universities and research institutes developed numerous multi-scale simulation technologies/tools to analyze the failure mechanism and to achieve the high reliability design with the capability of high volume production and low cost. This paper reviews the multi-scale modeling techniques for reliability and processing issues in Cu/low-k IC back-end structure, from the continuum level to the atomic scale

Similar works

This paper was published in NARCIS .

Having an issue?

Is data on this page outdated, violates copyrights or anything else? Report the problem now and we will take corresponding actions after reviewing your request.