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CHARACTERISATION OF AN ELECTROSTATIC VIBRATION HARVESTER

By T. M. Sterchen, G. Altena, P. Fiorini and R Puers

Abstract

Harvesting energy from ambient vibration is proposed as an alternative to storage based power supplies for autonomous systems. The system presented converts the mechanical energy of a vibration into electrical energy by means of a variable capacitor, which is polarized by an electret. A lumped element model is used to study the generator and design a prototype. The device has been micromachined in silicon, based on a two-wafer process. The prototype was successfully tested, both using an external polarization source and an electret

Topics: Micro power generators and micro energy sources
Publisher: EDA Publishing Association, Grenoble, France
Year: 2007
OAI identifier: oai:documents.irevues.inist.fr:2042/14625
Provided by: I-Revues

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Citations

  1. (2004). Architectures for Vibration-Driven MicroPower Generators”,
  2. (2005). Combining BCB with KOH : wet bulk micromachining vs. wafer bonding.”
  3. (2005). Improving Power Output for Vibration-Based Energy Scavengers”,

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