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By T. M. Sterchen, G. Altena, P. Fiorini and R Puers


Harvesting energy from ambient vibration is proposed as an alternative to storage based power supplies for autonomous systems. The system presented converts the mechanical energy of a vibration into electrical energy by means of a variable capacitor, which is polarized by an electret. A lumped element model is used to study the generator and design a prototype. The device has been micromachined in silicon, based on a two-wafer process. The prototype was successfully tested, both using an external polarization source and an electret

Topics: Micro power generators and micro energy sources
Publisher: EDA Publishing Association, Grenoble, France
Year: 2007
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Provided by: I-Revues
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