Location of Repository

Friction Drive Simulation of a Surface Acoustic Wave Motor by Nano Vibration

By Minoru Kurosawa and Takashi Shigematsu


A physical analysis model of a surface acoustic wave (SAW) motor which is driven by frictional force resulted in nano meters elastic vibration has been proposed. In case of the SAW motor, the vibraition ampllitude is from several nano meters to 30 nm at most. The vibraion amplitude is almost same as the elastic deformation caused by preload between a slider and stator. In the analysis model, the elastic defomation, stick and slip were considered. Dynamic simulation was carried out successfuly. Experimental results of 9.6 MHz opration frequency SAW motor were compared to the simulation results. It was understood that smaller slider projection slider with a lot of projections has high contact surface stiffness, so that superior performances are obtained in speed and thrust

Publisher: EDAP Editions , Grenoble, France
Year: 2007
OAI identifier: oai:documents.irevues.inist.fr:2042/14124
Provided by: I-Revues
Download PDF:
Sorry, we are unable to provide the full text but you may find it at the following location(s):
  • http://hdl.handle.net/2042/141... (external link)
  • http://irevues.inist.fr/utilis... (external link)
  • Suggested articles


    To submit an update or takedown request for this paper, please submit an Update/Correction/Removal Request.